PI offers a high performance parallel-kinematic Z-Tip-Tilt stage based on air bearing linear slide technology.
The compact air-bearing positioning system is designed for demanding alignment, inspection, metrology, semiconductor, and photonics applications.

The A-523 combines three degrees of freedom (Z, tip, and tilt) in one compact package, a great advantage of its parallel-kinematics design.   

Based on frictionless air bearings, ironless direct-drive linear motors, and nanometer-resolution optical encoders, the stage delivers exceptional positioning performance while eliminating the wear, maintenance, and stick-slip effects associated with conventional mechanical bearing systems. The system provides 5mm of Z travel, tip/tilt motion up to approximately 2 degrees, and supports payloads up to 8kg on a large 250mm diameter platform.

Air Bearings and Parallel Kinematics Enable Superior Performance

Unlike stacked mechanical stages, the A-523 utilizes a parallel-kinematic architecture with a single moving platform driven by three synchronized linear motors. This design minimizes overall height, reduces moving mass and inertia, and eliminates the accumulation of geometric errors often associated with stacked-axis systems. The result is a highly dynamic motion platform with exceptional repeatability, positioning accuracy, and long-term stability.

The frictionless air-bearing design provides smooth motion free of backlash, hysteresis, and wear. With no rolling elements or mechanical contact surfaces, the system is ideally suited for cleanroom environments and applications where long service life and consistent performance are critical.